Chimiro che piezoiresistive sensor

Mune iyi sensor, iyo inopesana mitsetse inosanganiswa paMonocrystalline dicon Diafragm nekuita silish piephresistive chip, uye iyo periphery yeiyo chip Sensoresiston Sensor Sensor, anozivikanwawo seyakasimba-nyika yekumanikidza sensor, iyo inoda kuti inzwe masimba ekunze, asi anonzwa zvakananga kudzvanywa kuburikidza neSilicon diaphragm.

Rimwe divi reSilicon diaphragm ndeyekumanikidza kwekumanikidza kwekutaurirana neyekumanikidza kuyamwisa, uye rumwe rutivi rwakaderera-kudzvinyirira cavity kutaurirana nemamiriro ekunze. Kazhinji, iyo silicon diaphragm yakagadzirwa sedenderedzwa yakagadziriswa periphery, uye iyo ina yeiyo yekudzvinyirira nzvimbo uye mamwe maviri ari mumativi ekushushikana kwesimba diaphragm.

Uye zvakare, pane zvakare mraba silicon diaphragm uye silicon column sensor. Silicon cylindrical sensor zvakare inogadzirwa nemitsetse yekupokana neyakaitwa ndege yekristani yeiyo siliton cylinder, uye maviri emamiriro ekumanikidza kudzvinyirira mitsetse inodzora mitsetse inoumba bhiriji yakazara.

PiezoResistive sensor yakagadzirwa neisimba kuramba pane substrate yeMicononductor zvinhu zvinoenderana nePiemonDuctor Chinyorwa cheMicononductor. Substrate yayo inogona kushandiswa zvakanyatsoshandiswa senzwi kuyera, uye kukanganisa kwakabatana kwakabatana mune substrate muchimiro chebhiriji.

Kana iyo substrate yakaremara neyekunze simba, tsika dzekudzivirira dzichachinja uye bhiriji rinogadzira inoenderana isina kunyorwa. Iyo substrates (kana diaphragms) inoshandiswa sePizoResistive sensors inonyanya silicon Wafers uye mawadhi eGermany. Silishon piezoResistive sensors yakagadzirwa neSilicon Wafers seyakakwezva zvinhu zvakakwezva zvakanyanya uye zvakanyanya kutarisisa, kunyanya yakasimba piezodza sensuresistance nekumhanyisa inonyanya kushandiswa.