Chimiro chePiezoresistive Sensor

Mune iyi sensor, iyo resistor strip inosanganiswa pane monocrystalline silicon diaphragm nekubatanidza maitiro kugadzira silicon piezoresistive chip, uye periphery yeiyi chip yakanyatsoiswa muhombodo, uye electrode inotungamira inoburitswa kunze. Piezoresistive pressure sensor, inozivikanwawo seyakasimba-state pressure sensor, yakasiyana neadhesive strain gauge, inoda kunzwa simba rekunze zvisina kunanga kuburikidza ne elastic sensitive elements, asi inonzwa zvakananga kudzvinyirirwa kwakayerwa kuburikidza nesilicon diaphragm.

Rimwe divi resilicon diaphragm igomba remushonga wepamusoro-soro rinotaurirana nedzvinyiriro yakayerwa, uye rimwe divi igomba rakaderera-rinotaurirana nemhepo. Kazhinji, iyo silicon diaphragm inogadzirwa sedenderedzwa rine denderedzwa rakagadziriswa, uye chiyero chedhayamita kusvika kuhupamhi chinenge 20 ~ 60. Zvikamu zvina zveP tsvina yekudzivirira zvinoparadzirwa munharaunda pa circular silicon diaphragm uye yakabatanidzwa muzambuko rakazara, maviri acho. ari munzvimbo yekumanikidza yekumanikidza uye mamwe maviri ari munzvimbo yekumanikidza yekumanikidza, iyo inofananidzwa nekuremekedza pakati pe diaphragm.

Uye zvakare, kune zvakare square silicon diaphragm uye silicon column sensor. Iyo silicon cylindrical sensor inogadzirwawo neanodzivirira mitsetse nekupararira mune imwe nzira yekristaro ndege yesilicon cylinder, uye maviri tensile stress resistive strips uye maviri compressive stress resistive strips anoumba bhiriji rakazara.

Piezoresistive sensor chishandiso chakagadzirwa nekupararira kuramba pane substrate ye semiconductor zvinhu zvinoenderana nepiezoresistive mhedzisiro ye semiconductor zvinhu. Iyo substrate yaro inogona kushandiswa zvakananga seyeresheni sensor, uye kupesana kwekupararira kwakabatana mu substrate muchimiro chebhiriji.

Kana iyo substrate yakaremara nekunze kwesimba, maitiro ekupikisa anochinja uye bhiriji rinoburitsa rinoenderana risingaenzaniswi. Iwo ma substrates (kana diaphragms) anoshandiswa sepiezoresistive sensors anonyanya kuve masilicon wafers uye germanium wafers. Silicon piezoresistive sensors yakagadzirwa nesilicon wafers sezvinhu zvinonzwisa tsitsi zvakakwezva kutarisisa kwakawanda, kunyanya iyo yakasimba-state piezoresistive sensors yekuyera kudzvanywa uye kumhanya ndiyo inonyanya kushandiswa.