Inokodzera Hitachi KM11 oiri pressure sensor EX200-2-3-5

Ina yekumanikidza tekinoroji yekumanikidza sensor

1. Capacitive

capacitive pressure sensors inowanzofarirwa nehuwandu hukuru hweOEM nyanzvi dzekushandisa. Kuona shanduko yecapacitance pakati penzvimbo mbiri inogonesa aya masensa kuti anzwe kuderera kwakanyanya kudzvinyirira uye vacuum mazinga. Mune yedu yakajairwa sensor kumisikidzwa, imba ine compact ine maviri akanyatso paradzana, akaenzana uye emagetsi ega masimbi ekunze, imwe yacho iri diaphragm inogona kukotama zvishoma pasi pekumanikidzwa. Idzi nzvimbo dzakasimba dzakasimba (kana mahwendefa) akaiswa kuitira kuti kukotama kwegungano kuchinje mukaha pakati pawo (chaizvoizvo kuumba chinoshanduka capacitor). Shanduko inokonzeresa inocherechedzwa neinonzwiwa mutsara wekuenzanisa wedunhu ne (kana ASIC), iyo inokudza uye inoburitsa yakaenzana yepamusoro-level chiratidzo.

2.CVD mhando

kemikari vapor deposition (kana "CVD") nzira yekugadzira zvisungo zvepolysilicon layer kune simbi isina tsvina diaphragm pa molecular level, nekudaro ichigadzira sensor ine yakanakisa yenguva refu yekudonha kuita. Yakajairwa batch processing semiconductor nzira dzekugadzira dzinoshandiswa kugadzira polysilicon strain gauge mabhiriji nekuita kwakanaka kwazvo pamutengo unonzwisisika. CVD chimiro chine yakanakisa mutengo kuita uye ndiyo inonyanya kufarirwa sensor muOEM application.

3. Sputtering film type

Sputtering firimu deposition (kana "firimu") inogona kugadzira sensor ine yakanyanya kusanganiswa mutsara, hysteresis uye kudzokorora. Kurongeka kwacho kunogona kunge kwakakwira se0.08% yechiyero chakazara, nepo kureba kwenguva refu kwakadzikira se0.06% yechiyero chakazara gore rega rega. Kusajairika kuita kwezviridzwa zvakakosha-yedu yakapfava yakaonda firimu sensor ipfuma muindasitiri inonzwa kumanikidza.

4.MMS mhando

Aya masensa anoshandisa micro-machined silicon (MMS) diaphragm kuona shanduko yekuchinja. Iyo silicon diaphragm yakaparadzaniswa kubva pakati nemafuta-akazadzwa 316SS, uye ivo vanopindura munhevedzano nemaitiro ekumanikidza kwemvura. MMS sensor inotora yakajairwa semiconductor yekugadzira tekinoroji, iyo inogona kuwana yakakwira voltage kuramba, mutsara wakanaka, yakanakisa kupisa kutyisa kuita uye kugadzikana mune compact sensor package.