Semiconductor pressure sensors inogona kugoverwa muzvikamu zviviri, imwe inobva pamutemo wekuti I-υ maitiro e semiconductor PN junction (kana schottky junction) kuchinja pasi pekunetseka. Kuita kwechinhu ichi chinonzwa kudzvinyirira hakuna kugadzikana uye hakuna kugadzirwa zvakanyanya. Imwe yacho inzwa yakavakirwa pane semiconductor piezoresistive athari, inova ndiyo huru yakasiyana-siyana ye semiconductor pressure sensor. Mumazuva ekutanga, semiconductor strain gauges ainyanya kusungirirwa kune elastic element kuita kwakasiyana siyana kushushikana uye dhizaini yekuyeresa zviridzwa. Muma1960, nekuvandudzwa kwesemiconductor yakabatanidzwa yedunhu tekinoroji, semiconductor pressure sensor ine diffusion resistor sepiezoresistive element yakaonekwa. Iri rudzi rwekumanikidza sensor ine yakapusa uye yakavimbika chimiro, hapana hama inofamba zvikamu, uye iyo inodzvanya inonzwa chinhu uye elastic element ye sensor yakabatanidzwa, inodzivirira mechanical lag uye kukambaira uye inovandudza mashandiro e sensor.

Piezoresistive effect ye semiconductor Semiconductor ine hunhu hune hukama nekunze kwesimba, ndiko kuti, resistivity (inomiririrwa nechiratidzo ρ) inoshanduka nekushushikana kwainotakura, iyo inonzi piezoresistive effect. Iko kushanduka kwakasiyana kwekudzivirira pasi pechiito che unit stress inonzi piezoresistive coefficient, iyo inoratidzwa nechiratidzo π. Inoratidzwa nemasvomhu se ρ/ρ = π σ.

Apo σ inomiririra kushushikana. Kuchinja kwekupikisa kukosha (R / R) kunokonzerwa nekudzivirira semiconductor pasi pekunetseka kunonyanya kugadziriswa nekuchinja kwekudzivirira, saka kutaura kwepiezoresistive effect kunogonawo kunyorwa se R / R = πσ.

Pasi pekuita kwesimba rekunze, kumwe kushushikana (σ) uye strain (ε) zvinogadzirwa mumakristasi esemiconductor, uye hukama huri pakati pawo hunotarwa neYoung's modulus (Y) yechinhu, kureva, Y=σ/ε.

Kana iyo piezoresistive effect inoratidzwa nekutambudzika pane semiconductor, iri R/R=Gε.

G inonzi senitivity factor yepressure sensor, inomiririra shanduko yakaenzana yekupokana kukosha pasi pe unit strain.

Piezoresistive coefficient kana senitivity factor ndiyo yakakosha yemuviri parameter ye semiconductor piezoresistive effect. Ukama huri pakati pavo, sehukama huri pakati pekunetseka uye kushushikana, hunotarirwa neYoung's modulus yezvinhu, kureva, g = π y.

Nekuda kweiyo anisotropy ye semiconductor crystals mu elasticity, Young's modulus uye piezoresistive coefficient shanduko ine crystal orientation. Hukuru hwe semiconductor piezoresistive mhedzisiro zvakare yakabatana zvakanyanya neresistive ye semiconductor. Iyo yakaderera iyo resistivity, iyo idiki iyo sensitivity factor. Iyo piezoresistive mhedzisiro yekupararira kuramba inotarwa nekristaro kutaridzika uye kusachena kusanganiswa kwekupararira kuramba. Kukoniwa kwetsvina kunonyanya kureva kudzika kwehutsvina hwepamusoro hwedhivhavha.