Iyo inowanzoshandiswa semiconductor pressure sensor inoshandisa N-type silicon wafer seyo substrate.Chekutanga, iyo silicon wafer inogadzirwa kuita elastic stress-inotakura chikamu neimwe geometry.Pachikamu chinotakura kushushikana chesilicon wafer, ina P-type diffusion resistors inogadzirwa nenzira dzakasiyana dzekristaro, uyezve zambuko remaoko mana reWheatstone rinoumbwa neaya mana anopikisa.Pasi pekuita kwesimba rekunze, kushanduka kwemaitiro ekupikisa kunova zviratidzo zvemagetsi.Iri bhiriji rewheatstone rine simba rekumanikidza ndiro mwoyo wekumanikidza sensor, iyo inowanzonzi piezoresistive bridge (sezvinoratidzwa mumufananidzo 1).Maitiro epiezoresistive bhiriji ndeaya anotevera: ① maitiro ekupikisa emaoko mana ebhiriji akaenzana (ese r0);② Iyo piezoresistive mhedzisiro yemaoko epedyo ebhiriji yakaenzana mukukosha uye yakatarisana nechiratidzo;③ Iyo yekupikisa tembiricha coefficient yemaoko mana ebhiriji akafanana, uye anogara ari patembiricha imwe chete.Mumuonde.1, R0 ndiyo kukosha kwekupokana pasina kushushikana pane tembiricha yekamuri;RT ndiyo shanduko inokonzerwa nekushisa kwehutano hwekudzivirira (α) kana kutonhora kuchichinja;Υ Rδ ndiko kushanduka kwekupikisa kunokonzerwa nekutambudzika (ε);Mhepo inobuda yebhiriji ndeye u=I0 Δ Rδ=I0RGδ (inogara iripo ikozvino bhiriji).

Iko I0 inogara iripo ikozvino sosi ikozvino uye e inogara iri voltage sosi voltage.Mhepo inobuda yebhiriji yepiezoresistive yakaenzana zvakananga kune dhiziri (ε) uye haina chekuita neRT inokonzerwa neiyo tembiricha coefficient yekupikisa, iyo inoderedza zvakanyanya kupisa kwekushisa kwe sensor.Iyo inonyanya kushandiswa semiconductor pressure sensor is sensor yekuona fluid pressure.Chimiro chayo chikuru ndeye capsule yakagadzirwa ne-monocrystalline silicon (sezvinoratidzwa mumufananidzo 2).Iyo diaphragm inogadzirwa mukapu, uye pasi pemukombe chikamu chinotakura simba rekunze, uye bhiriji rekumanikidza rinoitwa pasi pemukombe.Iyo mhete pedestal inogadzirwa neiyo yakafanana silicon single crystal material, uye ipapo diaphragm inosungirirwa kune pedestal.Rudzi urwu rwekumanikidza sensor ine zvakanakira kunzwisiswa kwepamusoro, vhoriyamu diki uye kusimba, uye yakashandiswa zvakanyanya mukubhururuka nendege, nzvimbo yekufamba, otomatiki zviridzwa uye zviridzwa zvekurapa.