Injini Dzvinyiridzi Sensor 2CP3-68 1946725 yeCarter Excavator

Nzira yekugadzirira sensor sensor, inoratidzwa nekuenzanisa matanho anotevera:

S1, inopa wafer ine kumashure kumashure uye nzvimbo yepamberi; Kugadzira iyo piezodza stresistive strip uye yakanyanya kurwiswa nzvimbo yekuwonekera nzvimbo yePethe pamberi pewafer; Kugadzira kudzvinyirira kwakadziva kudzvinyirira nekukasira kumashure kweakatsauka;

S2, kurongedza pepa rekutsigira kumashure kweiyo herfer;

S3, kugadzira kutungamira maburi uye masimbi aires ari parutivi rwemberi rwewaseti, uye inobatanidza piezoesistive mitsetse yekuumba gorosi bhiriji;

S4, kuendesa uye kuumba sosi yepasirese yepamberi yeiyo chafer, uye kuvhura chikamu cheiyo passivation layer kuti igadzire nzvimbo yesimbi. 2. Iyo nzira yekugadzira yeiyo yekumanikidza sensor maererano neyekutevera matanho ekutevera: Kupa wafer kumusoro uye kumberi, uye kutsanangura ubvu hwekumanikidza firimu rakadzvanywa; S12: Ion Kubviswa kwashandiswa pane kumberi kweiyo wafer, mitsetse yePeferesisives yakagadzirwa neyakaipisisa gadziriso yekushatisa, uye matunhu ekuonana akaitwa. S13: Kuisa uye kuumba denderedzwa rakadzivirirwa pamusoro peakatsamwa; S14: Kugadzira uye kugadzira yakadzvanywa yakadzika marara kumashure kweiyo chidimbu kuumba iyo yekumanikidza inodzvinyirira firimu. 3

Muna 1962, tufte et al. akagadzira piezo resistresistive sensor ine silicon piezopresistive mitsetse uye silicon firimu chimiro kekutanga, uye akatanga kutsvagurudza paPiezoResisive Service. Mukupera kwema1960 uye kutanga kwa1970, kuoneka kwezvidimbu zvitatu, zvinonzi Tekinoroji yekubatanidza uye neAnodic Kuremedza Sensor, iyo yakatanga basa rakakosha mukuvandudza mashandiro ekumanikidza sensor. Kubva 1980s, nekuwedzera kukura kwezvinhu zvemukati, zvakadai seanistropic etching, litefomputer, kusanganisa, kushushikana, iko kushushikana kwakavandudzwa, uye kubudikidza nekukwira kwakakwirira uye kuita kwakanaka. Panguva imwecheteyo, kukura uye kushandiswa kwetsvina matsva emicromloging tekinoroji inoita kuti rwizi rwakarukwa rwevanze sensor zvakarongeka.