Inoshanda kune Passat mafuta zvakajairika njanji kumanikidza sensor 06E906051K

1. Nzira yekugadzira sensor yekumanikidza, inosanganisira:

Kupa semiconductor substrate, umo yekutanga interlayer dielectric layer, yekutanga interlayer dielectric layer uye yechipiri interlayer dielectric layer inoumbwa pane semiconductor substrate.

Chidimbu chemagetsi chepasi mune yekutanga interlayer dielectric layer, yekutanga mutual electrode iri panzvimbo imwechete seyepasi electrode ndiro uye yakaparadzana.

Kubatanidza layers;

Kugadzira chibairo chepamusoro pamusoro peplate yepasi;

Kugadzira ndiro yepamusoro ye electrode pane yekutanga interlayer dielectric layer, yekutanga interconnection layer uye chibayiro chechibayiro;

Mushure mekugadzira chirairo chechibayiro uye vasati vagadzira ndiro yepamusoro, muchikamu chekutanga chekubatanidza

Kugadzira groove yekubatanidza, uye kuzadza groove yekubatanidza neplate yepamusoro kuti ibatane nemagetsi neyekutanga yekubatanidza layer;Kana kuti,

Mushure mekugadzira ndiro yepamusoro ye electrode, magirodhi ekubatanidza anoumbwa mundiro yepamusoro ye electrode uye yekutanga yekubatanidza layer, iyo.

Kugadzira conductive layer inobatanidza iyo yepamusoro electrode plate uye yekutanga yekubatanidza layer mune yekubatanidza groove;

Mushure memagetsi ekubatanidza ndiro yepamusoro uye yekutanga yekubatanidza layer, kubvisa chibairo chekugadzira kuita mhango.

2. Nzira yekugadzira sensor yekumanikidza maererano nekutaura 1, umo mune yekutanga layer

Iyo nzira yekugadzira iyo yekupira layer pane interlayer dielectric layer inosanganisira anotevera matanho:

Kuisa chibairo chezvinyorwa pane yekutanga interlayer dielectric layer;

Kugadzira danda rezvinhu zvechibairo kuti riite chibairo.

3. Nzira yekugadzira sensor yekumanikidza maererano nekutaura 2, umo photolithography uye engraving inoshandiswa.

Iyo yekupira zvinhu layer inofananidzwa ne etching process.

4. Nzira yekugadzira sensor yekumanikidza maererano nekutaura 3, umo mupiro wechibayiro

Nyaya yacho ndeye amorphous carbon kana germanium.

5. Nzira yekugadzira sensor yekumanikidza maererano nekutaura 4, umo mupiro wechibayiro

Nyaya yacho ndeye amorphous carbon;

Etching magasi anoshandiswa mukugadzira iyo yekupira zvinhu layer inosanganisira O2, CO, N2 uye Ar;

Maparamita ari mukuita etching iyo yekupira zvinhu layer ndeye: kuyerera kweO2 ndeye 18 SCCM ~ 22 SCCM, uye kuyerera kweCO i10%.

Kuyerera kunobva pa90 SCCM kusvika 110 SCCM, kuyerera kweN2 kunobva pa90 SCCM kusvika 110 SCCM, uye kuyerera kweAr.

Iyo mhando ndeye 90 SCCM ~ 110 SCCM, iyo yekumanikidza renji i90 mtor ~ 110 mtor, uye simba rekurerekera riri

540w～660w.