Engine pressure sensor 2CP3-68 1946725 yeCarter excavator

Iyo nzira yekugadzirira yekumanikidza sensor, inoratidzwa nekusanganisira anotevera matanho:

S1, ichipa wafer ine kumashure kumashure uye pamberi pechiso;Kugadzira piezoresistive strip uye yakanyanya doped nzvimbo yekusangana pamberi pechiso chewafe;Kugadzira kudzvanywa kwakadzika mhango nekuisa kumashure kwepamusoro pechingwa;

S2, kubatanidza pepa rekutsigira kumashure kwechingwa;

S3, kugadzira maburi emutobvu uye waya dzesimbi kudivi rekumberi kwechimedu, uye kubatanidza mitsetse yepiezoresistive kuita zambuko reWheatstone;

S4, kuisa uye kugadzira passivation layer pane yepamberi pechifukidziro, uye kuvhura chikamu chepassivation layer kuti iite simbi padhi nzvimbo.2. Nzira yekugadzira yekumanikidza sensor maererano nekutaura 1, umo S1 inonyatso sanganisira matanho anotevera: S11: kupa chidimbu chine musana wepamusoro uye nechemberi, uye kutsanangura kuwanda kwefirimu inodzvinyirira pamucheka;S12: ion implantation inoshandiswa pamberi pechiso chewaferi, piezoresistive mitsetse inogadzirwa nepamusoro-tembiricha yekupararira maitiro, uye nzvimbo dzekusangana dzakanyanya doped;S13: kuisa uye kugadzira chidziviriro chekudzivirira pamberi pechiso chewafe;S14: etching uye kugadzira kudzvanywa kwakadzika mhango kuseri kwewafer kuti igadzire firimu rinonetsa.3. Iyo nzira yekugadzira yekumanikidza sensor maererano nekutaura 1, umo wafer iri SOI.

Muna 1962, Tufte et al.yakagadzira piezoresistive pressure sensor ine diffused silicon piezoresistive mitsetse uye silicon firimu chimiro kekutanga, ndokutanga tsvakiridzo yepiezoresistive pressure sensor.Mukupera kwema1960 nekutanga kwema1970, kutaridzika kwehunyanzvi hutatu, hunoti, silicon anisotropic etching tekinoroji, ion implantation tekinoroji uye anodic bonding tekinoroji, yakaunza shanduko huru kune yekumanikidza sensor, iyo yakaita basa rakakosha mukuvandudza kushanda kweiyo pressure sensor. .Kubva 1980s, pamwe nekuvandudzwa kwehunyanzvi hwekuita micromachining, senge anisotropic etching, lithography, diffusion doping, ion implantation, bonding uye kupfeka, saizi yekumanikidza sensor yakaramba ichideredzwa, senitivity yakavandudzwa, uye kubuda kwakakwira uye. kuita kwakanaka.Panguva imwecheteyo, kusimudzira uye kushandiswa kwehunyanzvi hutsva hwe micromachining hunoita kuti iyo firimu ukobvu hwekumanikidza sensor kunyatsodzorwa.