Inoshanda kuti passat mafuta yakajairika njanji yekumanikidza sensor 06e906051k

1. Nzira yekuumba sensor sensor, inosanganisira:

Kupa Semiconductor Substrate, INE PEATTER PENYEREER DIELETRI DEYTRIC LAY, Yekutanga Interlayer Dilelectric Layer uye yechipiri Interlayer dielectric layer inoumbwa pane semicononductor substrate.

Iyo yakadzika electrode plate mune yekutanga Interlayer Dileleetric Layer

Inobatanidza matanda;

Kuumba chibayiro chechibairo pamusoro peiyo yepazasi polar ndiro;

Kugadzira iyo yepamusoro Electrode Plate pane yekutanga Interlayer Dilelectric Layer, yekutanga yekubatana kwechibayiro uye chibayiro chechibayiro;

Mushure mekuumba chibayiro chechibairo uye vasati vagadzira iyo yepamusoro ndiro, mune yekutanga yekubatana layer

Kugadzira iyo yekubatanidza groove, uye kuzadza iyo yekubatanidza groove ine iyo yepamusoro ndiro yekubatanidza nemagetsi pamwe neyekutanga yekubatana layer; Kana,

Mushure mekuumba iyo yepamusoro Electrode Plate, inobatanidza grooves inoumbwa mune yepamusoro Electrode Plate uye yekutanga interconnection layer, iyo

Kugadzira dura rekuita kuunganidza iyo yepamusoro Electrodel CLate uye yekutanga interconnection layer mune yekubatanidza groove;

Mushure mekubatanidza zvemagetsi inobatanidza iyo yepamusoro ndiro uye yekutanga yekubatanidza layer, kubvisa iyo yekubayira chibayiro kuti iite cavity.

2. Iyo nzira yekugadzira iyo yekumanikidza sensor maererano nekutaura 1, mauri mune yekutanga layer

Nzira yekuumba iyo chibayiro chechibayiro pane iyo Interlayer dielectric layer inosanganisira matanho anotevera:

Kuisa chibayiro chechipiriso chezvipfuyo pane chekutanga chipindira dielectric layer;

Kubata chibayiro chezvipiriso cheshuwa kuumba chibayiro chechibairo.

3. Iyo nzira yekugadzira iyo yekumanikidza sensor maererano nekutaura 2, umo photolithography uye kunyora inoshandiswa.

Chibayiro chezvipiriso zvinoenderana nenzira inoitwa nemaitiro ekuita.

4. Iyo nzira yekuumba sensor sensor maererano nekutaura 3, uko kwechibayiro chechibairo

Izvo zvinyorwa ndezvemorphous kabhoni kana Germeium.

5. Iyo nzira yekugadzira iyo yekumanikidza sensor maererano nekutaura 4, uko kwechibayiro chechibairo

Zvinyorwa zviri pamorphous kabhoni;

Etching magasi anoshandiswa mukuita kwekutora chibayiro chezvake zvekunyora chibvumirano chinosanganisira O2, CO, N2 naARI;

Iyo paramita mukuita kwekutora chibayiro chezvipiriso zvinhu ndezvekuti: Iyo kuyerera kweO2 is 18 sccm ~ 22 sccm, uye kuyerera kweCO ndeye 10%.

Iyo inoyerera chiyero kubva pamakumi mapfumbamwe nemashanu

Iyo renji iri 90 sccm ~ 110 sccm, iyo yekumanikidza renji ndeye 90 mtor ~ 110 mtor, uye simba rekusarura

540w ~ 660w.